SWIR Cameras for Wafer Inspection
The requirements for systems used in the production, processing, and inspection of semiconductor and related electronic components continue to increase in accordance with technological advancements. The shrinking of structures and the increasing demands on quantity and quality require higher resolutions, faster frame rates, and enhanced functionalities.
Why SWIR
In the modern semiconductor industry, innovative inspection systems must be capable of detecting surface and sub-surface defects with high precision throughout the entire manufacturing process. This encompasses bare, bonded and diced wafers as well as packaged ICs. Short Wavelength Infra-Red (SWIR) cameras are particularly well-suited, as they allow for observation through the silicon (Si) part of wafers.
Your advantages
Our newest SWIR camera, the fxo992, pushed the resolution to 5.2MP allowing the detection of smaller defects in Wafer and Packaged IC inspection applications.
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Reliable sub-surface inspection with high detail
High-Resolution SWIR cameras with up to 5.2MP, high image quality supported by image optimization algorithms*, precise sensor alignment and optional thermo-electric cooling (TEC) -
Increased throughput while maintaining inspection accuracy
High-performance CXP-12 & 10GigE interfaces with high stability and low latency data transfer -
Precise synchronization of processes
Advanced I/O control with critical timing tolerance and precise trigger including easy-to-use sequencer
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Reduced system costs
For example, through our integrated lighting controller -
Precise mechanical and functional fit
OEM flexibility for housing and firmware customization -
Accelerated time to market
Easy integration with standardized interfaces, GenICam compliance and an easy-to-use SDK -
Reduced system downtime
Robust cameras with reliable performance around the clock
* e.g., 2-point non-uniformity correction (NUC) and defect pixel correction (DPC)
Why us?
With over 35 years of experience in Machine Vision and state-of-the-art technology, we use our know-how to continuously innovate and produce reliable high-performance cameras to help our customers in realizing next generation inspection systems.
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fxo992
- 10GigE or CXP-12
- 132.6 fps
- 5.2 MP
- C-Mount
- Integrated Multichannel Strobe Controller
- GenICam Interface & Transportlayer
- TEC and TECless options
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fxo993
- 10GigE or CXP-12
- 173.4 fps
- 3.1 MP
- C-Mount
- Integrated Multichannel Strobe Controller
- GenICam Interface & Transportlayer
- TEC and TECless options
Contact us!
Our Machine Vision experts look forward to helping you find the perfect camera for your requirements.