Invisible turns Visible

SWIR Cameras for Wafer Inspection

The requirements for systems used in the production, processing, and inspection of semiconductor and related electronic components continue to increase in accordance with technological advancements. The shrinking of structures and the increasing demands on quantity and quality require higher resolutions, faster frame rates, and enhanced functionalities.

Why SWIR

In the modern semiconductor industry, innovative inspection systems must be capable of detecting surface and sub-surface defects with high precision throughout the entire manufacturing process. This encompasses bare, bonded and diced wafers as well as packaged ICs. Short Wavelength Infra-Red (SWIR) cameras are particularly well-suited, as they allow for observation through the silicon (Si) part of wafers.

two images showing a wafer on a test image: intransparent under visible light, transparent with SWIR
In the SWIR Spectral range silicon exhibits transparency.
two close-up images of a wafer: with visible cracks in SWIR, without cracks in visible light
SWIR cameras are a reliable solution for the identification of sub-surface defects.

Your advantages

Our newest SWIR camera, the fxo992, pushed the resolution to 5.2MP allowing the detection of smaller defects in Wafer and Packaged IC inspection applications.

3 details of a test image in VGA, 1.34 MP and 5.32 MP showing clearer details each step
  • Reliable sub-surface inspection with high detail
    High-Resolution SWIR cameras with up to 5.2MP, high image quality supported by image optimization algorithms*, precise sensor alignment and optional thermo-electric cooling (TEC)
  • Increased throughput while maintaining inspection accuracy
    High-performance CXP-12 & 10GigE interfaces with high stability and low latency data transfer
  • Precise synchronization of processes
    Advanced I/O control with critical timing tolerance and precise trigger including easy-to-use sequencer
  • Reduced system costs
    For example, through our integrated lighting controller
  • Precise mechanical and functional fit
    OEM flexibility for housing and firmware customization
  • Accelerated time to market
    Easy integration with standardized interfaces, GenICam compliance and an easy-to-use SDK
  • Reduced system downtime
    Robust cameras with reliable performance around the clock

* e.g., 2-point non-uniformity correction (NUC) and defect pixel correction (DPC)

Why us?

With over 35 years of experience in Machine Vision and state-of-the-art technology, we use our know-how to continuously innovate and produce reliable high-performance cameras to help our customers in realizing next generation inspection systems.

  • fxo992

    fxo992
    • 10GigE or CXP-12
    • 132.6 fps
    • 5.2 MP
    • C-Mount
    • Integrated Multichannel Strobe Controller
    • GenICam Interface & Transportlayer
    • TEC and TECless options
  • fxo993

    fxo993
    • 10GigE or CXP-12
    • 173.4 fps
    • 3.1 MP
    • C-Mount
    • Integrated Multichannel Strobe Controller
    • GenICam Interface & Transportlayer
    • TEC and TECless options

Contact us!

Our Machine Vision experts look forward to helping you find the perfect camera for your requirements.

Please note: In order for us to process your request as soon and as completely as possible, we forward your data from the contact form, if necessary, to our distributors and partners (third parties on the issue of data protection). The data will be deleted after processing your request, if there are no statutory storage requirements. A use for other purposes will not take place. You may revoke your consent regarding the future use of your personal data at any time by sending an email to .

» Detailed information about our handling of personal information can be found in our privacy statement.


SWIR

Model [MP] Resolution [pixel] Sensor Sensor Size Frame
Rate [fps]
Chroma Mount Interface Availa-
bility
exo991MGE 0.3 640 x 512 IMX991AABJ / Sony 4.1mm (Type 1/4) 260 SWIR C GigE
300
exo990MGE 1.3 1280 x 1024 IMX990AABJ / Sony 8.2mm (Type 1/2) 94.4 SWIR C GigE
300
exo990MU3 1.3 1280 x 1024 IMX990AABJ / Sony 8.2mm (Type 1/2) 125.4 SWIR C USB3
300
fxo990MCX 1.3 1280 x 1024 IMX990AABJ / Sony 8.2mm (Type 1/2) 134 SWIR C CXP-12 with 1 Connection
300
fxo993MCX 3.1 2048 x 1536 IMX993-AABJ / Sony 8.9mm (Type 1/1.8) 173.4 SWIR C CXP-12 with 1 Connection
300
fxo993MCX-T 3.1 2048 x 1536 IMX993-AABA (TEC) / Sony 8.9mm (Type 1/1.8) 173.4 SWIR C CXP-12 with 1 Connection
300
fxo993MXGE 3.1 2048 x 1536 IMX993-AABJ / Sony 8.9mm (Type 1/1.8) 173.4 SWIR C 10GigE
300
fxo993MXGE-T 3.1 2048 x 1536 IMX993-AABA (TEC) / Sony 8.9mm (Type 1/1.8) 173.4 SWIR C 10GigE
300
fxo992MCX 5.2 2560 x 2048 IMX992-AABJ / Sony 11.4mm (Type 1/1.4) 132.6 SWIR C CXP-12 with 1 Connection
300
fxo992MCX-T 5.2 2560 x 2048 IMX992-AABA (TEC) / Sony 11.4mm (Type 1/1.4) 132.6 SWIR C CXP-12 with 1 Connection
300
fxo992MXGE 5.2 2560 x 2048 IMX992-AABJ / Sony 11.4mm (Type 1/1.4) 132.6 SWIR C 10GigE
300
fxo992MXGE-T 5.2 2560 x 2048 IMX992-AABA (TEC) / Sony 11.4mm (Type 1/1.4) 132.6 SWIR C 10GigE
300